- 专利标题： ENCAPSULATED STRUCTURE FOR QUANTUM RESISTANCE STANDARD
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申请号： EP22156496.6申请日： 2022-02-14
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公开(公告)号： EP4047381A1公开(公告)日： 2022-08-24
- 发明人: PARK, Jaesung , LIM, Kyung-Geun , CHAE, Dong-Hun
- 申请人： Korea Research Institute of Standards and Science
- 申请人地址： KR Daejeon 34113 267, Gajeong-ro Yuseong-gu
- 代理机构： Behr, Wolfgang
- 优先权： KR20210019796 20210215
- 主分类号： G01R35/00
- IPC分类号： G01R35/00 ; H01L23/08 ; G01R1/20 ; G01R3/00 ; G01R15/20 ; H01L43/14
摘要：
An encapsulated structure (1000) for a quantum resistance standard according to an embodiment of the present invention includes a base (100); an object (200) disposed on the base and providing a measurement value of the quantum Hall resistance; two or more conductive lines (300) connected to the object on one end; and a cap (400) isolating the object from outside air.
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