• 专利标题: OBSERVATION METHOD BY MEANS OF SCANNING TRANSMISSION ELECTRON MICROSCOPE, SCANNING TRANSMISSION ELECTRON MICROSCOPE SYSTEM, AND PROGRAM
  • 申请号: EP20885208.7
    申请日: 2020-06-11
  • 公开(公告)号: EP4057320B1
    公开(公告)日: 2024-07-24
  • 专利权人: The University of Tokyo
  • 当前专利权人: The University of Tokyo
  • 当前专利权人地址: 3-1 Hongo 7-chome
  • 代理机构: Bandpay & Greuter
  • 优先权: JP 19203552 2019.11.08
  • 国际申请: JP2020023022 2020.06.11
  • 国际公布: WO2021090528 2021.05.14
  • 主分类号: H01J37/22
  • IPC分类号: H01J37/22 H01J37/244 H01J37/28
OBSERVATION METHOD BY MEANS OF SCANNING TRANSMISSION ELECTRON MICROSCOPE, SCANNING TRANSMISSION ELECTRON MICROSCOPE SYSTEM, AND PROGRAM
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