- 专利标题： EVAPORATION SOURCE AND EVAPORATOR
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申请号： EP20873356.8申请日： 2020-12-22
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公开(公告)号： EP4098768A1公开(公告)日： 2022-12-07
- 发明人: GIBO, Manabu , EHIRA, Hiroshi , SAKAMOTO, Junichi
- 申请人： ULVAC, Inc.
- 申请人地址： JP Chigasaki-shi, Kanagawa 253-8543 2500, Hagisono
- 代理机构： Zacco GmbH
- 优先权： JP2020011830 20200128
- 国际公布： WO2021153104 20210805
- 主分类号： C23C14/24
- IPC分类号： C23C14/24
摘要：
The invention provides an evaporator that is heated by an electron beam in vacuum, evaporates or sublimates a vapor-deposition material, and forms a lithium-containing compound coating on a surface of a substrate in transfer by codeposition. The evaporator includes a hearth liner that includes a cooler; and a plurality of liners that are accommodated in the hearth liner, each of which has the vapor-deposition material thereinside.
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