- 专利标题: HOLLOW-CORE PHOTONIC CRYSTAL FIBER BASED BROADBAND RADIATION GENERATOR
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申请号: EP21205790.5申请日: 2021-11-01
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公开(公告)号: EP4174568A1公开(公告)日: 2023-05-03
- 发明人: BAUERSCHMIDT, Sebastian, Thomas , GÖTZ, Peter, Maximilian , UEBEL, Patrick, Sebastian
- 申请人: ASML Netherlands B.V.
- 申请人地址: NL 5500 AH Veldhoven P.O. Box 324
- 代理机构: ASML Netherlands B.V.
- 主分类号: G02F1/365
- IPC分类号: G02F1/365 ; G02B6/02
摘要:
A source control arrangement for a radiation source comprising a hollow-core photonic crystal fiber (HC-PCF) having a hollow core with a core diameter, comprising: at least one processor; and a pulse chirping arrangement configured to receive pulsed pump radiation and controllably chirp the pulsed pump radiation so as to output chirped pulsed pump radiation for exciting a working medium comprised within the hollow core of the fiber at a pressure. The at least one processor is operable to configure source parameters of the radiation source, which include one or both of the pressure and a pulse chirp parameter, such that the chirped pulsed pump radiation undergoes a spectral broadening process within the HC-PCF, thereby generating an output radiation having a predefined spectrum for a reference core diameter of the HC-PCF, so as to compensate for variation in the core diameter with respect to the reference core diameter.
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