- 专利标题: COMPOSITE SHEET AND METHOD FOR MANUFACTURING SAME, AND LAYERED BODY AND METHOD FOR MANUFACTURING SAME
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申请号: EP21875538.7申请日: 2021-09-27
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公开(公告)号: EP4191664A1公开(公告)日: 2023-06-07
- 发明人: MINAKATA, Yoshitaka , WAKUDA, Yusuke , KANEKO, Masahide , SAKAGUCHI, Shinya , YAMAGUCHI, Tomoya
- 申请人: Denka Company Limited
- 申请人地址: JP Tokyo 103-8338 1-1 Nihonbashi-Muromachi 2-chome Chuo-ku
- 代理机构: Hoffmann Eitle
- 优先权: JP2020163279 20200929
- 国际公布: WO2022071236 20220407
- 主分类号: H01L23/36
- IPC分类号: H01L23/36 ; H01L23/373
摘要:
A composite sheet 10 includes porous a nitride sintered body 20 having a thickness of less than 2 mm and resins filled in pores of the nitride sintered body 20, and has a main surface 10a (10b) having a maximum height roughness Rz of less than 20 µm. A method for manufacturing the composite sheet 10 includes an impregnating step of impregnating pores of a porous the nitride sintered body 20 having a thickness of less than 2 mm with a resin composition, a smoothing step of smoothing the resin composition attached to a main surface of the nitride sintered body 20 to obtain a resin-impregnated body in which a part of the main surface is exposed, and a curing step of heating the resin-impregnated body to cure or semi-cure the resin composition impregnated in the pores to obtain the composite sheet 10.
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