The disclosure relates to a substrate holder (S1) for holding a substrate (1) in a chemical and/or electrolytic surface treatment of the substrate (1), a substrate handling system comprising a substrate holder (S1) and an immersion scanner unit (S2) and a use of a substrate holder (S1) for holding a substrate (1) with a width in a range of 1000 to 3500 mm and a length in a range of 1000 to 4000 mm.
The substrate holder (S1) for holding a substrate (1) in a chemical and/or electrolytic surface treatment of the substrate (1) comprises a substrate carrier (2) and a power contact unit (3). The substrate carrier (2) comprises a frame (2a) to carry the substrate (1). The power contact unit (3) comprises a body (3a), a plurality of main legs (3b) extending from the body (3a) at least partially along an edge of the substrate carrier (2) and a plurality of side legs (3c) each arranged essentially perpendicular at one of the main legs (3b) to contact the substrate (1). The power contact unit (3) further comprises a plurality of retaining elements (3d) provided between the body (3a) of the power contact unit (3) and the frame (2a) of the substrate carrier (2) to keep the substrate (1) in contact with the power contact unit (3) when the substrate (1) is placed onto the substrate carrier (2).