The present invention concerns an aerosol generating device for generating a precursor-comprising aerosol flow for a plasma coating process, the aerosol generating device comprising an aerosol droplet separator and a set of atomizing compartments, whereby the aerosol droplet separator comprises a nozzle outlet, a precursor recycling outlet and an aerosol channel therebetween, and whereby each atomizing compartment comprises: - a fluid flow channel comprising an atomizer gas flow inlet and an atomizer gas flow outlet fluidly connected to the aerosol channel; - a precursor channel comprising a precursor channel inlet and a precursor channel outlet, the precursor channel outlet fluidly connected to the fluid flow channel for introducing precursor droplets into a gas flow in the fluid flow channel; - a precursor reservoir for a liquid precursor the precursor reservoir in fluid connection with the precursor channel inlet; - a droplet introduction means located at or near the precursor channel outlet for introducing liquid precursor droplets from the precursor reservoir via the precursor channel into a gas flow in the fluid flow channel; - a dilution flow channel separated from the fluid flow channel, the dilution flow channel comprising a dilution flow inlet and a dilution flow outlet fluidly connected to the aerosol channel, whereby for each atomizing compartment, the dilution flow outlet is located between the atomizer gas flow outlet and the nozzle outlet of the aerosol droplet separator.