发明公开
- 专利标题: SOURCE STRUCTURE OF THREE-DIMENSIONAL MEMORY DEVICE AND METHOD FOR FORMING THE SAME
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申请号: EP23193785.5申请日: 2018-03-01
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公开(公告)号: EP4258843A3公开(公告)日: 2024-08-07
- 发明人: HU, Yushi , LU, Zhenyu , TAO, Qian , CHEN, Jun , YANG, Simon Shi-Ning , YANG, Steve Weiyi
- 申请人: Yangtze Memory Technologies Co., Ltd.
- 申请人地址: CN Wuhan, Hubei 430000 No.88 Weilai 3rd Road East Lake High-tech Development Zone
- 专利权人: Yangtze Memory Technologies Co., Ltd.
- 当前专利权人: Yangtze Memory Technologies Co., Ltd.
- 当前专利权人地址: CN Wuhan, Hubei 430000 No.88 Weilai 3rd Road East Lake High-tech Development Zone
- 代理机构: Lippert Stachow Patentanwälte Rechtsanwälte
- 优先权: CN 1711236924 2017.11.30
- 分案原申请号: 18884481.5 2018.03.01
- 主分类号: H10B43/27
- IPC分类号: H10B43/27 ; H10B43/40
摘要:
Embodiments of source structure of a three-dimensional (3D) memory device and method for forming the source structure of the 3D memory device are disclosed. In an example, a NAND memory device includes a substrate, an alternating conductor/dielectric stack, a NAND string, a source conductor layer, and a source contact. The alternating conductor/dielectric stack includes a plurality of conductor/dielectric pairs above the substrate. The NAND string extends vertically through the alternating conductor/dielectric stack. The source conductor layer is above the alternating conductor/dielectric stack and is in contact with an end of the NAND string. The source contact includes an end in contact with the source conductor layer. The NAND string is electrically connected to the source contact by the source conductor layer. In some embodiments, the source conductor layer includes one or more conduction regions each including one or more of a metal, a metal alloy, and a metal silicide.
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