N-H FREE AND SI-RICH PERHYDRIDOPOLYSILZANE COMPOSITIONS, THEIR SYNTHESIS, AND APPLICATIONS
摘要:
Solid or liquid N-H free, C-free, and Si-rich perhydropolysilazane compositions comprising units having the following formula [-N(SiH3)x(SiH2-)y], wherein x=0, 1, or 2 and y= 0, 1, or 2 when x+y=2; and x= 0, 1 or 2 and y=1, 2, or 3 when x+y=3 are disclosed. Also disclosed are synthesis methods and applications for the same.
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