- 专利标题: PN JUNCTION PREPARATION METHOD, PN JUNCTION AND MODULATOR
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申请号: EP22783956.0申请日: 2022-04-01
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公开(公告)号: EP4303645A1公开(公告)日: 2024-01-10
- 发明人: DONG, Zhen , LI, Yanbo
- 申请人: Huawei Technologies Co., Ltd.
- 申请人地址: CN Longgang Shenzhen, Guangdong 518129 Huawei Administration Building Bantian
- 代理机构: Goddar, Heinz J.
- 优先权: CN202110374346 20210407
- 国际公布: WO2022213889 20221013
- 主分类号: G02F1/015
- IPC分类号: G02F1/015 ; G02F1/025 ; G02F1/225
摘要:
A PN junction, a method for preparing a PN junction, and a modulator are disclosed. The PN junction includes a slab waveguide layer (401) and a plurality of waveguides (402) arranged on the slab waveguide layer (401) at intervals along a specific direction. The slab waveguide layer (401) includes P-type doped regions (401-1) and N-type doped regions (401-2) that are alternately arranged in the specific direction, and a carrier-depletion region (403) in a shape of S connected head to tail along the specific direction is formed at a boundary between the two types of regions. Each of the plurality of waveguides (402) arranged at intervals includes a P-type doped region (402-1) and an N-type doped region (402-2), and one carrier-depletion region (403) is formed at a boundary between the two regions. Projections of the P-type doped regions (402-1), the N-type doped regions (402-2), and the carrier-depletion regions (403) of the plurality of waveguides (402) arranged at intervals on a surface of a slab waveguide region basically coincide with projections of corresponding regions of the slab waveguide layer (401) on the surface of the slab waveguide region. The PN junction has high modulation efficiency and a low optical loss. The PN junction is implemented through ion-implantation doping at an inclined angle, so that preparation costs of the PN junction can be reduced.
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