- 专利标题: MICROFLUIDIC CHIP AND MANUFACTURING METHOD THEREOF
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申请号: EP21931711.2申请日: 2021-11-26
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公开(公告)号: EP4310513A1公开(公告)日: 2024-01-24
- 发明人: URAKAWA, Satoshi
- 申请人: SCREEN Holdings Co., Ltd.
- 申请人地址: JP Kyoto-shi, Kyoto 602-8585 Tenjinkita-machi 1-1 Teranouchi-agaru 4-chome Horikawa-dori Kamigyo-ku
- 代理机构: Goddar, Heinz J.
- 优先权: JP2021045561 20210319
- 国际公布: WO2022195968 20220922
- 主分类号: G01N37/00
- IPC分类号: G01N37/00 ; C12M1/26 ; C12N13/00 ; B01J19/00 ; G01N1/04 ; G01N27/02
摘要:
A technique for appropriately protecting electrodes of a microfluidic chip is provided. A microfluidic chip (1) includes a substrate (10), electrodes (31), insulation films (33), and a fluid holding part (20). The electrodes (31) are disposed on an upper surface of the substrate (10). The insulation films (33) cover upper surfaces of the respective electrodes (31). The insulation films (33) are comprised of an oxide film obtained by oxidizing a metal contained in the electrodes (31) or a nitride film obtained by nitriding the metal contained in the electrodes (31). The fluid holding part (20) is capable of accommodating a fluid over the insulation films (33).
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