Invention Publication
- Patent Title: SIMPLE SPHERICAL ABERRATION CORRECTOR FOR SEM
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Application No.: EP23189973.3Application Date: 2023-08-07
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Publication No.: EP4322197A1Publication Date: 2024-02-14
- Inventor: MOHAMMADI-GHEIDARI, Ali , HENSTRA, Alexander , MELE, Luigi
- Applicant: FEI Company
- Applicant Address: US Hillsboro, OR 97124 5350 NE Dawson Creek Drive
- Agency: Boult Wade Tennant LLP
- Priority: US202217883488 20220808
- Main IPC: H01J37/153
- IPC: H01J37/153

Abstract:
Compact correctors for correcting spherical aberrations of a particle-optical lens in a charged particle microscope system, according to the present disclosure a strong hexapole configured to generate a strong hexapole field when a voltage is applied to it, and a weak hexapole positioned between the strong hexapole and a sample. The strong hexapole is positioned such that the crossover of a charged particle beam of the charged particle system does not pass through the center of the strong hexapole, such that the strong hexapole field applies at least an A2 aberration and a D4 aberration to the charged particle beam. The weak hexapole is further positioned or otherwise configured such that, when a voltage is applied to the weak hexapole it generates a weak hexapole field that applies at least a combination A2 aberration and a combination D4 aberration to the charged particle beam of the charged particle microscopy system.
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