- 专利标题: SIMPLE SPHERICAL ABERRATION CORRECTOR FOR SEM
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申请号: EP23189973.3申请日: 2023-08-07
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公开(公告)号: EP4322197A1公开(公告)日: 2024-02-14
- 发明人: MOHAMMADI-GHEIDARI, Ali , HENSTRA, Alexander , MELE, Luigi
- 申请人: FEI Company
- 申请人地址: US Hillsboro, OR 97124 5350 NE Dawson Creek Drive
- 代理机构: Boult Wade Tennant LLP
- 优先权: US202217883488 20220808
- 主分类号: H01J37/153
- IPC分类号: H01J37/153
摘要:
Compact correctors for correcting spherical aberrations of a particle-optical lens in a charged particle microscope system, according to the present disclosure a strong hexapole configured to generate a strong hexapole field when a voltage is applied to it, and a weak hexapole positioned between the strong hexapole and a sample. The strong hexapole is positioned such that the crossover of a charged particle beam of the charged particle system does not pass through the center of the strong hexapole, such that the strong hexapole field applies at least an A2 aberration and a D4 aberration to the charged particle beam. The weak hexapole is further positioned or otherwise configured such that, when a voltage is applied to the weak hexapole it generates a weak hexapole field that applies at least a combination A2 aberration and a combination D4 aberration to the charged particle beam of the charged particle microscopy system.
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