- 专利标题: METHOD AND DEVICE FOR DEPOSITING COMPONENTS ON A TARGET SURFACE OF A TARGET AS WELL AS DONOR PLATE FOR USE THEREWITH
-
申请号: EP22202269.1申请日: 2022-10-18
-
公开(公告)号: EP4358121A1公开(公告)日: 2024-04-24
- 发明人: HENDRIKS, Rob Jacob , KOLDEWEIJ, Robin Bernardus Johannes
- 申请人: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO
- 申请人地址: NL 2595 DA 's-Gravenhage Anna van Buerenplein 1
- 专利权人: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO
- 当前专利权人: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO
- 当前专利权人地址: NL 2595 DA 's-Gravenhage Anna van Buerenplein 1
- 代理机构: V.O.
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L21/683
摘要:
A deposition device (1) is disclosed herein for depositing components (Ca, Cb,..) on a target surface (TS) of a target (T), the deposition device comprises a donor plate (3), at least one heater element (33), a power supply (6), a target manipulation device and a controller (5) configured for controlling the power supply (6) and the target manipulation device (2;21, 22). The controller causes the power supply (6) to supply at least a first pulse (Pulse 1) of electric power to the at least one heater element (33) in a zone (32) to heat the donor plate surface (31s) in at least a first subzone (32a) of that zone to a surface temperature exceeding a threshold temperature of an adhesive specimen (7a) in said first subzone (32a). Subsequent to a change of a lateral position of the target (T) relative to the donor plate (3), the controller causes the power supply (6) to supply at least a second pulse (Pulse 2) of electric power to the heater element to heat the donor plate surface (31s) in at least a second subzone (32b) to a surface temperature exceeding a threshold temperature of the adhesive specimen (7b) in said second subzone (32b). Therewith components within a zone sharing a same heater element can be transferred independently from each other.
信息查询
IPC分类: