发明公开
- 专利标题: INSPECTION SYSTEM AND METHOD
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申请号: EP22836959.1申请日: 2022-07-06
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公开(公告)号: EP4369058A1公开(公告)日: 2024-05-15
- 发明人: CHEN, Zhiqiang , ZHANG, Li , HUANG, Qingping , ZHOU, Yong , DING, Hui , JIN, Xin , JI, Chao
- 申请人: Nuctech Company Limited , Tsinghua University
- 申请人地址: CN TongFang Building Shuangqinglu Haidian District Beijing 100084 2nd Floor, Block A
- 专利权人: Nuctech Company Limited,Tsinghua University
- 当前专利权人: Nuctech Company Limited,Tsinghua University
- 当前专利权人地址: CN TongFang Building Shuangqinglu Haidian District Beijing 100084 2nd Floor, Block A
- 代理机构: Gunzelmann, Rainer
- 优先权: CN 202110770903 2021.07.07
- 国际申请: CN2022104141 2022.07.06
- 国际公布: WO2023280213 2023.01.12
- 主分类号: G01V5/00
- IPC分类号: G01V5/00 ; G01N23/046
摘要:
An inspection system, including: at least one ray source (100) rotatable between at least two scanning positions around a rotation axis, and a rotation angle of at least one ray source between two adjacent scanning positions is greater than an angle of adjacent target spots of each ray source (100) relative to the rotation axis; a detector assembly (200), and a conveying device (300) configured to carry an object to be inspected. At least one ray source (100) and the detector assembly (200) are movable in a traveling direction relative to the conveying device (300), so that the object (10) to be inspected may enter an inspection region (30). When at least one ray source (100) is located at one of scanning positions, at least one ray source (100) and the detector assembly (200) move in the traveling direction relative to the conveying device (300) and at least one ray source (100) emits X-rays; after at least one ray source (100) and the detector assembly (200) move a predetermined distance in the traveling direction relative to the conveying device (300), at least one ray source (100) rotates around the rotation axis to another of scanning positions.
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