- 专利标题: EPITAXIAL SOURCE OR DRAIN REGION WITH A WRAPPED CONDUCTIVE CONTACT
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申请号: EP23200754.2申请日: 2023-09-29
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公开(公告)号: EP4386851A1公开(公告)日: 2024-06-19
- 发明人: JUN, Hwichan
- 申请人: INTEL Corporation
- 申请人地址: US Santa Clara, CA 95054 2200 Mission College Blvd.
- 专利权人: INTEL Corporation
- 当前专利权人: INTEL Corporation
- 当前专利权人地址: US Santa Clara, CA 95054 2200 Mission College Blvd.
- 代理机构: 2SPL Patentanwälte PartG mbB
- 优先权: US 2218082851 2022.12.16
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L29/08 ; H01L29/417 ; H01L29/423 ; H01L29/66 ; H01L29/775 ; H01L29/10 ; H01L29/161
摘要:
Techniques are provided herein to form semiconductor devices having one or more epitaxial source or drain regions wrapped by a conductive contact to form an improved ohmic contact. A first semiconductor device includes a first semiconductor region extending between a first source or drain region and a second source or drain region, and a second semiconductor device includes a second semiconductor region extending between the first source or drain region and a third source or drain region. The first and second semiconductor devices include a subfin region adjacent to a dielectric layer. A conductive layer extends around the first source or drain region such that the conductive layer at least contacts the sidewalls of the first source or drain region and both upper and lower surfaces of the source or drain region. A dielectric layer is also present between the conductive contact and the subfin region.
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