发明公开
- 专利标题: WAFER POLISHING SYSTEM
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申请号: EP22866477.7申请日: 2022-08-30
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公开(公告)号: EP4400258A1公开(公告)日: 2024-07-17
- 发明人: XU, Xiaoyu
- 申请人: Hangzhou Sizone Electronic Technology Inc.
- 申请人地址: CN Hangzhou Zhejiang 311300 Wu Yu 1st Floor, Building 1 No. 88, Chuangye Street Qingshanhu, Linan
- 专利权人: Hangzhou Sizone Electronic Technology Inc.
- 当前专利权人: Hangzhou Sizone Electronic Technology Inc.
- 当前专利权人地址: CN Hangzhou Zhejiang 311300 Wu Yu 1st Floor, Building 1 No. 88, Chuangye Street Qingshanhu, Linan
- 代理机构: Becker, Eberhard
- 优先权: CN 2122142759U 2021.09.07
- 国际申请: CN2022115771 2022.08.30
- 国际公布: WO2023036011 2023.03.16
- 主分类号: B24B29/02
- IPC分类号: B24B29/02 ; B24B37/00 ; B24B27/00
摘要:
Disclosed in the present invention is a wafer polishing system, at least comprising a polishing unit, which comprises a fixed working station and two polishing modules, wherein the polishing modules are located on two sides of the fixed working station; each polishing module comprises a polishing platform and a polishing arm, which can drive a wafer to move relative to the polishing platform, so as to implement a polishing process; the polishing arms of the polishing modules on the two sides are located in a diagonal direction of the fixed working station; and the polishing arms can respectively swing between the fixed working station and the polishing platforms to transfer the wafer, and movement regions of the polishing arms having an overlapping portion. By means of the present invention, the polishing arm of each polishing module is independently controlled, so as to achieve better stability and flexibility; and only one fixed working station is needed to achieve the cooperation of multiple polishing modules to implement the polishing process of single or multiple wafers, so that the movement path in the polishing process is greatly shortened, which minimizes the time of the transfer process and improves the polishing efficiency.
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