- 专利标题: METHODS OF MANUFACTURING A PEROVSKITE OPTOELECTRONIC DEVICE
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申请号: EP23152921.5申请日: 2023-01-23
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公开(公告)号: EP4404712A1公开(公告)日: 2024-07-24
- 发明人: MOON, Soo-Jin , BLONDIAUX, Nicolas , WALTER, Arnaud , ANDREATTA, Gaëlle , PARACCHINO, Adriana , KAMINO, Brett
- 申请人: CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement
- 申请人地址: CH 2002 Neuchâtel Rue Jaquet-Droz 1 P.O. Box
- 专利权人: CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement
- 当前专利权人: CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement
- 当前专利权人地址: CH 2002 Neuchâtel Rue Jaquet-Droz 1 P.O. Box
- 代理机构: e-Patent SA
- 主分类号: H10K30/40
- IPC分类号: H10K30/40 ; H10K30/85 ; H10K85/50 ; H10K85/00
摘要:
Method of manufacturing an optoelectronic device (1), comprising the steps of:
- providing a substrate (3);
- depositing a first electrode layer (5) on said substrate (3);
- depositing a first charge-carrier selective layer (7) with a thickness less than 5nm situated directly on said first electrode layer (5);
- depositing insulating silicon oxide nanoparticles (8) directly on said first charge-carrier selective layer (7), said particles having a diameter between 10 nm and 100 nm;
- depositing a perovskite-based semiconductor layer (9) on said first charge-carrier selective layer (7) and on said insulating silicon oxide nanoparticles (8), said perovskite-based semiconductor layer (9) being in intimate contact with both said first charge-carrier selective layer (7) and said insulating silicon oxide nanoparticles (8);
- depositing a second charge-carrier selective layer (11) on said perovskite-based semiconductor layer;
- depositing a second electrode layer (13) on said second charge-carrier selective layer (11).
- providing a substrate (3);
- depositing a first electrode layer (5) on said substrate (3);
- depositing a first charge-carrier selective layer (7) with a thickness less than 5nm situated directly on said first electrode layer (5);
- depositing insulating silicon oxide nanoparticles (8) directly on said first charge-carrier selective layer (7), said particles having a diameter between 10 nm and 100 nm;
- depositing a perovskite-based semiconductor layer (9) on said first charge-carrier selective layer (7) and on said insulating silicon oxide nanoparticles (8), said perovskite-based semiconductor layer (9) being in intimate contact with both said first charge-carrier selective layer (7) and said insulating silicon oxide nanoparticles (8);
- depositing a second charge-carrier selective layer (11) on said perovskite-based semiconductor layer;
- depositing a second electrode layer (13) on said second charge-carrier selective layer (11).
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