发明公开
- 专利标题: INTEGRATED CIRCUIT DEVICE
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申请号: EP24151763.0申请日: 2024-01-15
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公开(公告)号: EP4435847A1公开(公告)日: 2024-09-25
- 发明人: HWANG, Ingeon , KIM, Jinbum , KIM, Hyojin , LEE, Sangmoon , NAM, Yongjun , LEE, Taehyung
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si, Gyeonggi-do 16677 129, Samsung-ro Yeongtong-gu
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do 16677 129, Samsung-ro Yeongtong-gu
- 代理机构: Kuhnen & Wacker Patent- und Rechtsanwaltsbüro PartG mbB
- 优先权: KR 230036926 2023.03.21
- 主分类号: H01L21/8234
- IPC分类号: H01L21/8234 ; H01L27/088 ; H01L29/06 ; H01L29/10 ; H01L29/165 ; H01L29/66 ; H01L29/775 ; H01L29/78 ; H01L29/786
摘要:
An integrated circuit device (100) includes a fin-type active region (F1) on a substrate (102), a nanosheet (N1, N2; N3) on a fin top surface of the fin-type active region, the nanosheet being apart from the fin top surface of the fin-type active region in a vertical direction, a gate line (160) surrounding the nanosheet on the fin-type active region, and a source/drain region (130) on the fin-type active region, the source/drain region being in contact with the nanosheet, wherein the nanosheet includes a multilayered sheet comprising a first outer semiconductor sheet (S1), a core semiconductor sheet (S2), and a second outer semiconductor sheet (S3), which are sequentially stacked in the vertical direction.
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