气体的供给及时期望的流速进入腔室。 和压力控制的流量计，以及压力控制式流量计的上游侧的第一阀，使用第二阀下游压力控制式流量计的气体供应控制方法， 连接到所述第一和第二阀的控制阀具有控制阀和第二阀，孔口和控制阀V1和孔口和第二之间的气体供给配管的容积之间设置节流孔 阀之间的气体供给配管的容积V2为V1 / V2≧9中，压力P1和孔口和在孔口和控制阀，所述气体之间的气体供给管的所述第二阀之间的气体供给管的压力P2 保持P1> 2×P2电源之间，打开第一阀控制气体通过打开和在控制所述控制阀的状态下关闭所述第二阀的控制供给，提供的气体供给控制的方法。 点域4

The present invention relates to supply promptly desired flow rate of gas into the chamber.
And A pressure-controlled flow meter, an upstream first valve of the pressure control type flow meter, a gas supply control method using a second valve downstream pressure control type flow meter, a control valve connected to the first and second valve, control valves and having an orifice provided between the second valve, the second and the volume V ₁ and the orifice of the gas supply pipe between the orifice and the control valve the volume V ₂ of the gas supply pipe between two valves are _V 1 / V 2 ≧ 9, the pressure P of the gas supply pipe between the pressure P ₁ and the orifice of the gas supply pipe between the orifice and the control valve and the second valve ₂ and is maintained to P _1> 2 × P ₂ between supplying gas, opening the first valve controls the supply of gas by opening and closing control of the second valve in a state of controlling the control valve, the gas supply control method is provided.
.FIELD 4