甲液化废气有效地去除，以提供一种能够抑制排气管或排气泵的堵塞或失效的膜形成装置。 A被连接到沉积室1中，第一管部10（冷却单元），用于从成膜室1，第一开口区域中的横截面的垂直方向相对于排气的移动方向导出的排气 已经S10中，第二管部20，第一管部10设置在排水部40之间设置用于在第一管部10，排气的移动方向上的液化排出的废气 的第二开口面积S20比第一开口面积较小S10保持针对垂直截面。 点域1

Disclosed The liquefied exhaust gas efficiently removed to provide a film forming apparatus capable of suppressing the clogging or failure of the exhaust pipe or exhaust pump.
A is connected to the deposition chamber 1, the first pipe section 10 (cooling section) to derive the exhaust gas from the deposition chamber 1, the first opening area in the vertical direction of the cross section with respect to the direction of movement of exhaust gas It has an S10, the second pipe portion 20, a first pipe portion 10, is provided between the drain unit 40 for draining exhaust gas liquefied in the first pipe portion 10, the moving direction of exhaust gas having a second opening area S20 is smaller than the first opening area S10 keep vertical direction of the cross section for.
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