Invention Patent
- Patent Title: Auxiliary sheet for laser dicing
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Application No.: JP2012512089Application Date: 2011-11-16
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Publication No.: JP4991024B1Publication Date: 2012-08-01
- Inventor: 光則 丸山 , 信行 阿部
- Applicant: 株式会社きもと
- Assignee: 株式会社きもと
- Current Assignee: 株式会社きもと
- Priority: JP2010271026 2010-12-06
- Main IPC: H01L21/301
- IPC: H01L21/301
Abstract:
An auxiliary sheet for laser dicing, which is not cut fully even in a dicing step using a short-wavelength laser and does not deteriorate workability, is provided. The auxiliary sheet for laser dicing of the present invention is characterized by comprising a substrate formed of a polyolefin film and an adhesive layer provided to one surface of the substrate, wherein total light transmittance is 50% or higher in a wavelength range of 300 to 400nm and haze is 70% or higher in a wavelength range of 300 to 400nm.
Public/Granted literature
- JPWO2012077471A1 レーザーダイシング用補助シート Public/Granted day:2014-05-19
Information query
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