一种用于通过粘合层将制造的衬底从与制造的衬底连接的载体衬底上剥离的设备，所述设备包括：膜框架; 连接到所述薄膜框架和性别具有用于在膜的接触表面部分中的产生的基板固定的粘合剂层，所述柔性膜是柔性耦合到膜框架中围绕所述接触表面部分膜膜柔性的安装部分 。 以及在由薄膜框架和所述膜特定的可变体积，被容纳在溶剂存储，其中，所述基板和所述接合层使所提供的移相器溶剂储存保留溶剂，接合层分离，并且; 用于将溶剂输送到溶剂储存器的输送装置; 剥离装置用于从载体基板上剥离制造的基板。 在另一个方面中，本发明由附接到所述框架和所述胶片帧膜的柔性膜形成，以形成用于保持溶剂的接合层分离溶剂存储; 除了将制造基底和粘合层固定到溶剂储存器之外， 并将溶剂转移到溶剂容器中; 并且通过从载体基板剥离基板而从基板剥离基板。

An apparatus for peeling off a substrate produced from the carrier substrate attached to the manufactured substrate by a bonding layer, the apparatus comprising a film frame; Is connected to the film frame and sex has an adhesive layer for fixing the produced substrate at a contact surface section of the film, the flexible film is a flexible coupled to the film frame in the mounting section of the flexible surrounding the contact surface sections film film .; As well as in particular a variable volume by a film frame and the film, a solvent storage provided in order to hold the solvent to separate the bonding layer, wherein a production substrate and the bonding layer can be accommodated in the solvent storage; Delivery means for delivering the solvent to the solvent storage; And making the substrate is performed by the peeling means for peeling from the carrier substrate.
In another aspect, the present invention is formed by a flexible film attached to the frame and the film frame film, to form a solvent storage for holding a solvent to separate the bonding layer; As well as securing the production substrate and bonding layer in a solvent storage; And, passing the solvent in the solvent storage; And it relates to, making a substrate by separating the substrate from the carrier substrate to the production method of peeling from the carrier substrate.