[PROBLEMS] to provide an ion implantation method and an ion implantation layer-forming composition and the resist lower layer film forming composition.
[MEANS FOR SOLVING PROBLEMS] Group 13, Group 14, Group 15 or step, above the impurity ions of the membrane to form a film by coating a film forming composition comprising a compound and an organic solvent containing an element of group 16 on a substrate and baked from and at the same time implanted into the substrate via the film, and ion implantation which comprises the step of introducing the element of Group 13, Group 14, Group 15 or Group 16 of the film during the substrate. The film-forming compositions, Group 13, Group 14, in the ion implantation layer film composition comprising a compound and an organic solvent containing an element of group 15 or group 16. Further, the lower layer is a resist film-forming composition comprising at least a compound having two acid ester.