The present invention relates to a ceramic heater for the heating elements embedded in a ceramic substrate, while improving the inversion phenomenon of the temperature-dependent resistivity, and an object thereof is to further suppress the in-plane variation of the electric resistivity.
The electrostatic chuck 10 is provided with an alumina ceramic substrate 12, the heater electrode 14 and the electrostatic electrodes 16 embedded in the alumina ceramic substrate 12 of the disk-like. The top surface of the alumina ceramic substrate 12, is a wafer placement surface (12a). The heating elements 14 is, for example, is formed as a pattern writing tips at a time so that the wiring over the surfaces of the alumina ceramic substrate 12, when a voltage is applied to the heating heats the wafer (W). The heater electrode 14 is to mainly composed of TiSi _2.