本发明的用于制造排列的碳纳米管集合体的装置是一种用于生产排列的碳纳米管集合体的装置，该装置被配置为通过以下方式使对准的碳纳米管集合体生长：使形成在基板表面上的催化剂被 由还原气体构成的减少气体环境; 至少加热催化剂或还原气体; 使催化剂被原料气体构成的原料气体环境包围; 并且至少对催化剂或原料气体进行加热，至少暴露于还原气体的装置部件或暴露于原料气体的装置部件由耐热合金制成，并且具有表面镀有熔融 铝。

Apparatus for manufacturing a carbon nanotube alignment assembly according to the invention, also a surrounding environment of the catalyst formed on the surface of the substrate to a reducing gas environment and as well as after heating at least one of the catalyst and the reducing gas, to the environment of the catalyst as the raw material gas environment should the addition to the catalyst and an apparatus for manufacturing a carbon nanotube alignment assembly for heating at least one of the source gas to grow the carbon nanotubes oriented aggregate, the apparatus components and the source gas which is exposed to the reducing gas, and the material of the at least one apparatus part of the components of the heat-resistant alloy is exposed, and the surface thereof is treated molten aluminum plating.