An apparatus for transferring a substrate includes: at least two process chambers arranging an exit through which the substrate exits adjacent to an entrance into which the substrate enters; and shafts installed at the process chambers respectively for transferring the substrate by rotation. The apparatus for transferring the substrate may include a distance compensation part installed between the exist and the entrance to support a rear surface of the substrate in order that a distance between the exist and the entrance may be compensated when the substrate passes between the exit and the entrance, and including a brush structured roller to prevent a damage to the rear surface of the substrate when the rear surface of the substrate is supported.