[主题]对被处理基板和支撑基板进行有效的剥离处理。 [解决方案]剥离装置包括：第一维护部件，用于将支撑基板保持在叠置的基板之间; 第二维护部件，用于将处理过的基板保持在叠加的基板之间; 以及移动部件，用于使第一维护部件的外周的一部分沿与第二维修部分分离的方向移动。 第一维护部件包括：连接到移动部件的平面弹性部件; 以及多个吸附部，安装在弹性部件上以吸附支撑基板。 在多个吸附部之间吸附作为剥离开始点的支承基板（S）的圆周部的圆周吸附部（53）通过嵌入形成中空部（521b）的垫部（521a）而被安装 ），其中所述支撑基板（S）的吸附表面（521a）打开并且在衬垫构件（521）的中空部分（521b）中，并且具有硬度高于所述衬垫构件的支撑构件（522） 521）。

[PROBLEMS] performs a separation process of the substrate and the supporting substrate efficiently.
[MEANS FOR SOLVING PROBLEMS] separation device from the first holding unit, of the superimposed substrate holding the second to maintain the target substrate portion, and the a portion of the outer periphery first holding portion second holding portion for holding the support board of the superimposed substrate, It has moving parts for moving the separating direction. A first holding portion is provided on the plate-shaped elastic member and an elastic member connected to the moving part, and has a plurality of adsorption to adsorb a supporting substrate. Of the plurality of suction portion, an outer suction portions 53 to adsorb a peripheral portion of the supporting substrate (S) which is a starting point of peeling, the absorption surface (521a) of the supporting substrate (S) is an opening with a hollow portion (521b) formed It has a pad member 521, and a support member is provided by engaging a hollow portion (521b) of the pad member 521, having a higher hardness than the pad member 521, 522.