提供传送单元。 传送单元是通过包括：多个轴沿第一方向平行放置并可旋转的第一方向输送基板; 多个辊分别放置在轴的外表面上以便与轴一起旋转并与基底接触; 固定在轴的两端的支撑框架从其上部看时被放置在第一方向上，并支撑轴; 轴承，其位于所述支撑框架内并围绕所述轴放置以与所述轴接触; 以及与轴承接触并接地的板。 辊，轴承和板可以由导电材料形成。

The present invention provides a transport unit. In the transport unit to transport the substrate in a first direction, said first are placed side by side along a first direction of rotation a plurality of the shaft as possible, are provided so as to be rotated together with the shaft to the outer surface of each of the shaft a plurality of contact with the substrate of the rollers, and fixed to both ends of the conveying shaft, when seen from top is provided along the first direction, is located in the support frame, the support frame for supporting said conveying shaft, the shaft in contact with the shaft comprising: a ground plate being provided to be in contact with the bearing, and the bearing arranged in the periphery of the roller, the bearing and the plate may be provided with a conductive material.