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KR102358171B1 하드마스크용 조성물 有权

  • 专利标题： 하드마스크용 조성물
  • 专利标题（英）： COMPOSITION FOR HARD MASK
  • 申请号： KR1020180011188
    申请日： 2018-01-30
  • 公开(公告)号： KR102358171B1
    公开(公告)日： 2022-02-03
  • 主分类号： G03F7/11
  • IPC分类号： G03F7/11 ;  G03F7/075
하드마스크용 조성물
摘要：
본발명은실록산(siloxane)기를포함하는졸(sol); 노볼락(Novolac) 수지; 및용매를포함하는, 하드마스크용조성물을제공한다. 하드마스크용조성물로부터할로겐화합물플라즈마와질소산소플라즈마에대한내에칭성, 용해성및 평탄성이동시에향상된하드마스크가형성될수 있다.
摘要（英）：

Embodiments of the present invention provide a precursor polymer which comprises a benzyl alcohol group as at least one among a terminal capping group and a linker group, and which has a polyamic acid or polyhydroxy amide structure. A polymer structure may be formed which exhibits improved mechanical properties by the cross-linking of the benzyl alcohol group.

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