【目的】提供一种耐蚀性组件，其系由陶瓷基材；与借由化学气相沉积法覆盖基材表面所得到的碳化硅膜所构成，该组件的耐蚀性高，即使施加热冲击，亦不会产生碳化硅膜的龟裂。 【解决方法】耐蚀性组件，其特征在于包括：一直径至少200mm以上的陶瓷基材；与一碳化硅膜，其至少覆盖与腐蚀性物质接触的上述基材表面部分，且为0.5mm以上之化学气相沉积碳化硅膜所构成。利用化学气相沉积法之膜形成温度沉积碳化硅膜步骤之后，再于较上述碳化硅膜形成温度高50℃以上的温度下进行加热处理。

A corrosion-resistant member includes a substrate made of a ceramic material and having a diameter of at least 200 mm, and a film of chemically vapor deposited silicon carbide having a thickness of not less than 0.5 mm and covering at least such a portion of the surface of the substrate that is to contact a corrosive material. A process is disclosed for producing such a corrosion-resistant member, which process includes thermally treating the film at a temperature higher, by not less than 50 DEG C centigrade, than a film-forming temperature at which the film of silicon carbide is formed, after the formation of the silicon carbide film.