Invention Grant
- Patent Title: Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
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Application No.: US12289515Application Date: 2008-10-29
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Publication No.: US10007194B2Publication Date: 2018-06-26
- Inventor: Osamu Tanitsu , Koji Shigematsu , Hiroyuki Hirota , Tomoyuki Matsuyama
- Applicant: Osamu Tanitsu , Koji Shigematsu , Hiroyuki Hirota , Tomoyuki Matsuyama
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2004-030555 20040206; JP2004-358218 20041210
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B27/28 ; F21V9/14 ; F21V13/02
Abstract:
There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
Public/Granted literature
- US20090073441A1 Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method Public/Granted day:2009-03-19
Information query
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