- 专利标题: Image sensor having first fixed charge film for anti-reflection and second fixed charge film for moisture protection
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申请号: US15090883申请日: 2016-04-05
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公开(公告)号: US10008535B2公开(公告)日: 2018-06-26
- 发明人: Seokha Lee , Kyungah Jeon , Yunki Lee
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2015-0113386 20150811
- 主分类号: H01L27/146
- IPC分类号: H01L27/146
摘要:
An image sensor includes a substrate including a plurality of photoelectric conversion parts and a pixel isolation trench extending from a surface of the substrate between the photoelectric conversion parts, a first fixed charge film directly on the surface of the substrate, a second fixed charge film directly on the first fixed charge film and an inner wall of the pixel isolation trench, and an insulating layer directly on the second fixed charge film, the insulating layer configured to fill the pixel isolation trench.
公开/授权文献
- US20170047371A1 IMAGE SENSOR HAVING FIXED CHARGE FILM 公开/授权日:2017-02-16
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