Invention Grant
- Patent Title: Imprint apparatus, and method of manufacturing article
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Application No.: US15224911Application Date: 2016-08-01
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Publication No.: US10011057B2Publication Date: 2018-07-03
- Inventor: Hiroshi Sato
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2015-158495 20150810; JP2016-132779 20160704
- Main IPC: B29C43/58
- IPC: B29C43/58 ; G03F7/00 ; B29C43/02

Abstract:
The present invention provides an imprint apparatus which forms a pattern of an imprint material on a substrate by using a mold, the apparatus comprising an image sensing unit configured to sense an image of the imprint material via the mold, and a control unit configured to, in a state in which the mold and the imprint material are in contact with each other, cause the image sensing unit to sense the image of the imprint material while scanning the image sensing unit and obtain information on forming of the pattern of the imprint material based on the image obtained by the image sensing unit.
Public/Granted literature
- US20170043511A1 IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2017-02-16
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