Invention Grant
- Patent Title: Four D device process and structure
-
Application No.: US14856967Application Date: 2015-09-17
-
Publication No.: US10011098B2Publication Date: 2018-07-03
- Inventor: Roy R. Yu , Wilfried Haensch
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: The Law Offices of Robert J. Eichelburg
- Main IPC: H01L23/498
- IPC: H01L23/498 ; H01L25/00 ; H01L25/065 ; B32B37/02 ; H01L23/473 ; H01L23/00 ; H01L25/18 ; H01L23/48 ; B32B37/12 ; B32B38/18 ; H01L29/06

Abstract:
A 4D device comprises a 2D multi-core logic and a 3D memory stack connected through the memory stack sidewall using a fine pitch T&J connection. The 3D memory in the stack is thinned from the original wafer thickness to no remaining Si. A tounge and groove device at the memory wafer top and bottom surfaces allows an accurate stack alignment. The memory stack also has micro-channels on the backside to allow fluid cooling. The memory stack is further diced at the fixed clock-cycle distance and is flipped on its side and re-assembled on to a template into a pseudo-wafer format. The top side wall of the assembly is polished and built with BEOL to fan-out and use the T&J fine pitch connection to join to the 2D logic wafer. The other side of the memory stack is polished, fanned-out, and bumped with C4 solder. The invention also comprises a process for manufacturing the device. In another aspect, the invention comprises a 4D process and device for over 50× greater than 2D memory density per die and an ultra high density memory.
Public/Granted literature
- US20160005686A1 FOUR D DEVICE PROCESS AND STRUCTURE Public/Granted day:2016-01-07
Information query
IPC分类: