Invention Grant
- Patent Title: Liquid processing apparatus
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Application No.: US14339539Application Date: 2014-07-24
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Publication No.: US10014190B2Publication Date: 2018-07-03
- Inventor: Yasushi Takiguchi , Koki Yoshimura , Taro Yamamoto , Hideharu Kyouda , Koshi Muta
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: JP2013-156115 20130726
- Main IPC: H01L21/67
- IPC: H01L21/67

Abstract:
A liquid processing apparatus for performing liquid processing with respect to a substrate using processing fluid, includes: a plurality of substrate holding units arranged side by side in a left-right direction; a nozzle configured to supply the processing fluid to the substrate held in each of the substrate holding units; and a nozzle moving mechanism configured to move the nozzle forward and backward in a front-rear direction intersecting an arrangement direction of the substrate holding units between a supplying position in which the processing fluid is supplied to a region including a central portion of the substrate and a waiting position which is defined at a rear side of a row of the substrate holding units opposite to a front side of the row of the substrate holding units at which the substrate is loaded and unloaded.
Public/Granted literature
- US20150027503A1 LIQUID PROCESSING APPARATUS Public/Granted day:2015-01-29
Information query
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