Invention Grant
- Patent Title: Electronic device including moat power metallization in trench
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Application No.: US15593496Application Date: 2017-05-12
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Publication No.: US10014214B2Publication Date: 2018-07-03
- Inventor: Josephine B. Chang , Leland Chang , Michael A. Guillorn , Chung-Hsun Lin , Adam M. Pyzyna
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Yuanmin Cai
- Main IPC: H01L21/4763
- IPC: H01L21/4763 ; H01L21/768 ; H01L23/528 ; H01L27/12 ; H01L21/74 ; H01L23/535

Abstract:
An electronic device is provided. The electronic device includes a semiconductor layer, a dielectric layer disposed on the semiconductor layer, circuitry disposed on the dielectric layer that includes interconnected cells, first contact line metallization and second contact line metallization, first power metallization disposed in-plane with or above the circuitry and second power metallization disposed in a trench defined in at least the dielectric layer. The electronic device further includes insulation disposed to insulate the second power metallization from the circuitry and the first power metallization at first locations and to permit electrical communication between the second power metallization, the circuitry and the first power metallization at second locations.
Public/Granted literature
- US20170250111A1 ELECTRONIC DEVICE INCLUDING MOAT POWER METALLIZATION IN TRENCH Public/Granted day:2017-08-31
Information query
IPC分类: