Invention Grant
- Patent Title: Method and structure to provide integrated long channel vertical FinFET device
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Application No.: US15393400Application Date: 2016-12-29
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Publication No.: US10014409B1Publication Date: 2018-07-03
- Inventor: Xusheng Wu , David Paul Brunco
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Scully Scott Murphy and Presser
- Agent Frank Digiglio
- Main IPC: H01L29/732
- IPC: H01L29/732 ; H01L21/8234 ; H01L27/088 ; H01L29/423 ; H01L29/78 ; H01L29/66 ; H01L29/40 ; H01L29/08 ; H01L29/06

Abstract:
A vertical fin field effect transistor includes a semiconductor fin disposed over a well region and a gate conductor layer disposed over a sidewall of the fin, and extending laterally over a top surface of the well region adjacent to the fin. The extension of the gate conductor over the bottom source/drain effectively increases the channel length of the vertical FinFET device independent of the fin height. A bottom source/drain region is laterally adjacent to the well region such that the portion of the well region covered by the laterally extended gate stack is between the bottom source/drain region and the portion of the well region immediately under the fin. A top source/drain region is located above the fin. The device is operated in circuits by use of electrical contacts to the bottom source/drain, the gate conductor, and the top source/drain.
Public/Granted literature
- US20180190817A1 METHOD AND STRUCTURE TO PROVIDE INTEGRATED LONG CHANNEL VERTICAL FINFET DEVICE Public/Granted day:2018-07-05
Information query
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