- 专利标题: Split rail structures located in adjacent metal layers
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申请号: US15294286申请日: 2016-10-14
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公开(公告)号: US10020261B2公开(公告)日: 2018-07-10
- 发明人: Chia-Tien Wu , Hsiang-Wei Liu , Wei-Chen Chu
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Haynes and Boone, LLP
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L23/535 ; H01L23/522 ; H01L23/528 ; H01L21/768
摘要:
A first metal layer of a semiconductor device includes a plurality of first metal lines that each extend along a first axis, and a first rail structure that extends along the first axis. The first rail structure is physically separated from the first metal lines. A second metal layer is located over the first metal layer. The second metal layer includes a plurality of second metal lines that each extend along a second axis orthogonal to the first axis, and a second rail structure that extends along the first axis. The second rail structure is physically separated from the second metal lines. The second rail structure is located directly over the first rail structure. A plurality of vias is located between the first metal layer and the second metal layer. A subset of the vias electrically interconnects the first rail structure to the second rail structure.
公开/授权文献
- US20180108611A1 SPLIT RAIL STRUCTURES LOCATED IN ADJACENT METAL LAYERS 公开/授权日:2018-04-19
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