发明授权
- 专利标题: Integrated memory
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申请号: US15400886申请日: 2017-01-06
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公开(公告)号: US10020360B1公开(公告)日: 2018-07-10
- 发明人: Durai Vishak Nirmal Ramaswamy
- 申请人: Micron Technology, Inc.
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Wells St. John P.S.
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L29/06 ; H01L27/11507 ; H01L27/108 ; H01L21/764
摘要:
Some embodiments include an integrated memory having an array of capacitors. The array has edges. The capacitors along the edges are edge capacitors, and the other capacitors are internal capacitors. The edge capacitors have inner edges facing toward the internal capacitors, and have outer edges in opposing relation to the inner edges. An insulative beam extends laterally between the capacitors. The insulative beam is along upper regions of the capacitors. First void regions are under the insulative beam, along lower regions of the internal capacitors, and along the inner edges of the edge capacitors. Peripheral extensions of the insulative beam extend laterally outward of the edge capacitors, and second void regions are under the peripheral extensions and along the outer edges of the edge capacitors. Some embodiments included integrated assemblies having two or more memory array decks stacked on atop another. Some embodiments include methods of forming memory arrays.
公开/授权文献
- US20180197949A1 INTEGRATED MEMORY 公开/授权日:2018-07-12
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