- 专利标题: Normally off gallium nitride field effect transistors (FET)
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申请号: US15365931申请日: 2016-11-30
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公开(公告)号: US10020389B2公开(公告)日: 2018-07-10
- 发明人: Anup Bhalla , Tinggang Zhu
- 申请人: Alpha and Omega Semiconductor Incorporated
- 申请人地址: US CA Sunnyvale
- 专利权人: Alpha and Omega Semiconductor Incorporated
- 当前专利权人: Alpha and Omega Semiconductor Incorporated
- 当前专利权人地址: US CA Sunnyvale
- 代理商 Bo-In Lin
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/778 ; H01L29/40 ; H01L29/20 ; H01L29/788 ; H01L29/10 ; H01L29/423 ; H01L29/417 ; H01L29/78
摘要:
A heterostructure field effect transistor (HFET) gallium nitride (GaN) semiconductor power device comprises a hetero-junction structure comprises a first semiconductor layer interfacing a second semiconductor layer of two different band gaps thus generating an interface layer as a two-dimensional electron gas (2DEG) layer. The power device further comprises a source electrode and a drain electrode disposed on two opposite sides of a gate electrode disposed on top of the hetero-junction structure for controlling a current flow between the source and drain electrodes in the 2DEG layer. The power device further includes a floating gate located between the gate electrode and hetero-junction structure, wherein the gate electrode is insulated from the floating gate with an insulation layer and wherein the floating gate is disposed above and padded with a thin insulation layer from the hetero-junction structure and wherein the floating gate is charged for continuously applying a voltage to the 2DEG layer to pinch off the current flowing in the 2DEG layer between the source and drain electrodes whereby the HFET semiconductor power device is a normally off device.
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