Invention Grant
- Patent Title: Thin film transistor and method of manufacturing of the same
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Application No.: US14637224Application Date: 2015-03-03
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Publication No.: US10020402B2Publication Date: 2018-07-10
- Inventor: Suk Hoon Ku , Hyunduck Cho
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2014-0101792 20140807
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/423 ; H01L29/66 ; H01L29/417

Abstract:
Provided are a thin film transistor (TFT) and a method of manufacturing the TFT. The TFT includes a substrate; a first conductive type semiconductor layer on the substrate and having a recess; second conductive type spacers at opposite side walls in the recess; a main semiconductor layer covering the first conductive type semiconductor layer and the second conductive type spacers and comprising a channel region and source and drain regions; a gate insulating layer on the main semiconductor layer; and a gate electrode on the gate insulating layer and corresponding to the recess.
Public/Granted literature
- US20160043233A1 THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING OF THE SAME Public/Granted day:2016-02-11
Information query
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