A first lamination step of forming lower electrode films on both surfaces of a diaphragm and directly forming a first Pb-containing perovskite oxide film which has a larger thermal expansion coefficient than that of the diaphragm and has a columnar structure on a front surface of the lower electrode film; and a second lamination step of directly forming a second Pb-containing perovskite oxide film on a front surface of the lower electrode film are sequentially performed. The second Pb-containing perovskite oxide film is formed under a condition that a difference between a molar ratio RA1 of Pb to a B-site element in the first Pb-containing perovskite oxide film and a molar ratio RB1 of Pb to a B-site element in the second Pb-containing perovskite oxide film after the second lamination step is 0.056 or less.