- 专利标题: Application device, imprinting apparatus, and method for manufacturing object
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申请号: US14721419申请日: 2015-05-26
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公开(公告)号: US10022900B2公开(公告)日: 2018-07-17
- 发明人: Tsuyoshi Arai , Yoshikazu Miyajima , Yutaka Mita , Akio Saito
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon U.S.A., Inc. IP Division
- 优先权: WOPCT/JP2014/064227 20140529
- 主分类号: B29C43/58
- IPC分类号: B29C43/58 ; B29C37/00 ; B29C43/34 ; G03F7/00
摘要:
Provided is an application device capable of extracting an imprinting material in which impurities are mixed from a container of the application device and supplying new imprinting material to the container of the application device. An application device according to the present disclosure is used to supply an imprinting material to a substrate in an imprinting apparatus that forms a pattern on the imprinting material on the substrate by using a mold. The application device includes a container unit that contains the imprinting material, and an ejecting unit that is provided on the container unit and that ejects the imprinting material contained in the container unit toward the substrate. The application device is detachably attachable to the imprinting apparatus.
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