- Patent Title: Imaging apparatus having a plurality of movable beam columns, and method of inspecting a plurality of regions of a substrate intended to be substantially identical
-
Application No.: US14755389Application Date: 2015-06-30
-
Publication No.: US10026588B2Publication Date: 2018-07-17
- Inventor: Kurt Stephen Werder , Lawrence P. Muray , James P. Spallas , William Daniel Meisburger
- Applicant: Keysight Technologies, Inc.
- Applicant Address: US CA Santa Rosa
- Assignee: Keysight Technologies, Inc.
- Current Assignee: Keysight Technologies, Inc.
- Current Assignee Address: US CA Santa Rosa
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/29 ; H01J37/20 ; H01J37/22 ; H01J37/02 ; H01L21/66
Abstract:
An apparatus for inspecting a substrate is described. The apparatus includes an X-Y stage that supports a substrate to be inspected and is operable to move a substrate supported thereby in X and Y directions; and an imaging system including a plurality of beam columns operable to irradiate regions of a substrate supported by the X-Y stage with beams of energy, respectively, discrete from one another. Respective ones of the beam columns are movable relative to others of the electron beam columns.
Public/Granted literature
Information query
