- 专利标题: Integrated semiconductor optical element and manufacturing method for same
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申请号: US15617104申请日: 2017-06-08
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公开(公告)号: US10027088B2公开(公告)日: 2018-07-17
- 发明人: Kazumasa Takabayashi , Tsuyoshi Yamamoto
- 申请人: FUJITSU LIMITED
- 申请人地址: JP Kawasaki
- 专利权人: FUJITSU LIMITED
- 当前专利权人: FUJITSU LIMITED
- 当前专利权人地址: JP Kawasaki
- 代理机构: Fujitsu Patent Center
- 主分类号: H01S5/026
- IPC分类号: H01S5/026 ; G02F1/017 ; G02F1/025 ; G02B6/122 ; H01S5/12 ; H01S5/22 ; G02B6/13 ; H01S5/10 ; G02F1/21 ; H01S5/227 ; H01S5/40
摘要:
The present invention relates to an optical semiconductor integrated element and manufacturing method for same solves difficulty in element manufacture, and reduces optical transmission loss. The present invention is provided with a stripe-shaped waveguide configured from a multilayer structure wherein at least a first conductivity-type lower cladding layer, a waveguide core layer, and an upper cladding layer are layered, and the upper cladding layer is formed using a second conductivity-type upper cladding layer, and an i-type upper cladding layer, which has a bent portion by being shifted in the perpendicular direction with respect to the main extending direction of the waveguide.
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