The invention relates to a device (100) for generating UV or X-ray radiation (R) by means of a plasma (10), comprising a first compartment (110), a dispensing device (5), which is adapted to provide a target material (80) in the first compartment (10), an excitation light source (13) for providing an excitation light beam (90), and a buffer gas inlet (130) and/or a buffer gas outlet (140) for providing a buffer gas flow (B) along the direction (D) of the excitation light beam (90) in the first compartment (110), wherein the first compartment (110) is adapted to be at least partially heated by a heating device (150).The invention further relates to a method for generating UV or X-ray radiation (R) by means of the device (100).