- 专利标题： Droplet positioning method, pattern forming method, droplet positioning program, droplet positioning device, and template pattern design method
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申请号： US13832570申请日： 2013-03-15
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公开(公告)号： US10029456B2公开(公告)日： 2018-07-24
- 发明人: Yasutada Nakagawa , Satoshi Tanaka , Yoko Takekawa
- 申请人： Toshiba Memory Corporation
- 申请人地址： JP Tokyo
- 专利权人： TOSHIBA MEMORY CORPORATION
- 当前专利权人： TOSHIBA MEMORY CORPORATION
- 当前专利权人地址： JP Tokyo
- 代理机构： Oblan, McClelland, Maier & Neustadt, L.L.P.
- 优先权： JP2012-068474 20120323
- 主分类号： B41J2/45
- IPC分类号： B41J2/45 ; B41J2/045 ; B29C43/02 ; G03F7/00 ; B82Y40/00 ; B82Y10/00
摘要：
In general, according to one embodiment, a method is disclosed for a droplet positioning method.The method can include determining an amount of the droplet required in each of a first region, determining a total amount of the droplet, determining a total number of the droplets, determining a provisional positioning of the droplets based on a template contact form, redividing the face for forming the base body pattern again using the second regions, and determining an evaluation value for each second region. If the distribution of the evaluation values is out of the target range, a repositioning at least any of the droplets, redividing the face for forming the base body pattern again using the second regions, and determining an evaluation value for each second region are repeated until distribution of the evaluation values is in the target range.
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