Invention Grant
- Patent Title: Displacement detecting device by light retroreflectance having first and second retroreflecting units with a common light receiving unit
-
Application No.: US15220483Application Date: 2016-07-27
-
Publication No.: US10030998B2Publication Date: 2018-07-24
- Inventor: Akihide Kimura
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kawaski-Shi
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kawaski-Shi
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2015-148381 20150728
- Main IPC: G01D5/26
- IPC: G01D5/26 ; G01D5/38

Abstract:
A displacement detecting device includes a scale diffraction grating and a detecting head unit. The detecting head unit includes a light source, a first retroreflecting unit that retroreflectes positive first-order diffracted light of light diffracted by the scale diffraction grating, such that the retroreflected light enters the scale diffraction grating again, a second retroreflecting unit that retroreflectes negative first-order diffracted light of the light diffracted by the scale diffraction grating, such that the retroreflected light enters the scale diffraction grating again, and a light receiving unit that receives an interference signal. Each of the first retroreflecting unit and the second retroreflecting unit has a deflecting function of deflecting light incident on the corresponding retroreflecting unit by a predetermined angle and then emitting the light.
Public/Granted literature
- US20170030744A1 DISPLACEMENT DETECTING DEVICE Public/Granted day:2017-02-02
Information query