Invention Grant
- Patent Title: Semiconductor device and display device including the semiconductor device
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Application No.: US15683845Application Date: 2017-08-23
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Publication No.: US10032929B2Publication Date: 2018-07-24
- Inventor: Junichi Koezuka , Masami Jintyou , Yukinori Shima
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2015-104495 20150522
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/66 ; H01L29/24 ; H01L27/12 ; H01L29/04

Abstract:
The reliability of a transistor including an oxide semiconductor is improved. The transistor in a semiconductor device includes a first oxide semiconductor film over a first insulating film, a gate insulating film over the first oxide semiconductor film, a second oxide semiconductor film over the gate insulating film, and a second insulating film over the first oxide semiconductor film and the second oxide semiconductor film. The first oxide semiconductor film includes a channel region overlapping with the second oxide semiconductor film, a source region and a drain region each in contact with the second insulating film. The channel region includes a first layer and a second layer in contact with a top surface of the first layer and covering a side surface of the first layer in the channel width direction. The second oxide semiconductor film has a higher carrier density than the first oxide semiconductor film.
Public/Granted literature
- US20170373196A1 SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING THE SEMICONDUCTOR DEVICE Public/Granted day:2017-12-28
Information query
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