- 专利标题: Physical quantity sensor, manufacturing method of physical quantity sensor, sensor device, electronic apparatus, and moving object
-
申请号: US15275831申请日: 2016-09-26
-
公开(公告)号: US10035697B2公开(公告)日: 2018-07-31
- 发明人: Satoru Tanaka
- 申请人: Seiko Epson Corporation
- 申请人地址: JP
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: JP2015-191434 20150929
- 主分类号: B81B3/00
- IPC分类号: B81B3/00 ; B81C1/00
摘要:
A physical quantity sensor includes a base substrate; a movable unit which is provided so as to be displaced with respect to the base substrate by facing the base substrate; a first fixed electrode and a second fixed electrode which are disposed on the base substrate by facing the movable unit; and a plurality of protrusion portions which are disposed at a position overlapped with the movable unit in a planar view, on the movable unit side of the base substrate, in which the protrusion portion includes a conductive layer with the same potential as that of the first fixed electrode and the second fixed electrode, and an insulating layer which is provided on a side opposite to the base substrate with respect to the conductive layer.
公开/授权文献
信息查询